捕獲的數(shù)據(jù)包括類型和點的距離及重合閘數(shù)。若電壓源來自于開口電壓，測距元件將不包含類型及位置。如果想要在報告中包括持續(xù)時間，用戶就必須投入并配置每個斷路器電弧電流特性。報告是基于每–相基準(zhǔn)。觸發(fā)可以是任何的操作數(shù),但對于大多數(shù)的應(yīng)用來講，希望同一的操作數(shù),如虛擬輸出,用來驅(qū)動輸出繼電器跳開開關(guān)。為了防止事件的覆蓋,擾動元件不應(yīng)用來觸發(fā)報告。當(dāng)報告被觸發(fā)時，報告觸發(fā)事件將會自動產(chǎn)生。

Luxtron End Point Monitor

GASONICS 95-2421 LIGHT BOX ASSEMBLY

UNIT O3 DESTRUCT,30 SLPM AMAT 0190-03012 REV B

VAT 012-002740-1R GATE VALVE REFURB

APPLIED MATERIALS ANALOG INTERFACE UNIT PN#01-81912-00

Tegal PN 40-294-003D Plasma Etch, Ceramic Ring, Lower

TEL TOKYO ELECTRON 1181-000253-1B PCB ASSY MC-31044A

NOAH CONTROLLER TEL RCM VRS 21 NOAH EMO/COMMUNICATI?ON C

NOAH CONTROLLER TEL RCM VRS 21 & NOAH EMO/COMM CABLE AS

NOAH CONTROLLER TEL RCM VRS 21 NOAH EMO/COMMUNICATI?ON C

NOAH CONTROLLER TEL RCM VRS 21 NOAH EMO/COMMUNICATI?ON C

ENI PL-2HF PLASMALOC LOW FREQUENCY GENERATOR

RORZE ROBOTS UST81126R ROBOT SANYO DENKI MOTOR RR304L1

APPLIED MATERIALS 0040-33264 HOLDER LEFT LL MULTI-SLOT

Tegal Plasma Etch, Electrode, Lower PN 39-735-002 Rev M

ENI OEM-6A-02 RF GENERATOR

ENI OEM-12B3-02 3-PHASE RF GENERATOR

LAM LOWER MATCH BOX CONTROLLER 853-480133-001

SENSARRAY CORPORATION 1840A-8-5063 Sensarray Wafer 17

SEIKO SEIKI STP 301 TURBOMOLECULAR PUMP VARIAN PART 9

Shimadzu Turbo Pump- TMP 280-L