繼電器啟動時,繼電器會自動準備好參數(shù)列表。所有可能的模擬測量實際值參數(shù)見附錄A。靈活邏輯參數(shù)。任何表中所列的參數(shù)索引列表用來使繼電器顯示參數(shù)的選擇更為快速。如果通過繼電器鍵盤1 顯示來流覽整個參數(shù)列表將是非常費時的,通過繼電器鍵盤輸入這個索引號可以令相應的參數(shù)顯示出來。CTIVT上的8個通道都存儲在錄波文件中, 模塊通道在文件中的名稱如下:<插槽位號><端子號>- .<| 或V><A. B或C相,或第4個輸入>
APPLIED EPI PN 301487 GASKET-FACE, SLIT-VALVE,
Lambda MX 13150
VEECO PROCESS METOR PN 304654
Tokyo Electron Heater, 2 TR0803 DS043-001614-1
TEL TOKYO ELECTRON 1181-000337-19 PCB ASSY MC31049-2
TD370/400 TURBO VACUUM PUMP CONTROLLER
GLASSMAN POWER SUPPLY PSWG-20P-15-M3
TEL TOKYO ELECTRON 1181-000465-12 PCB ASSY MC 31109A,D/
TEL TOKYO ELECTRONIC 1181-000537-15 PCB ASSY MC 31106A
EDWARDS ACTIVE GAUGE CONTROLLER D38661000
TEL TOKYO ELECTRON 1181-000538-12 PCB ASSY MC-31107A D/
Domnick Hunter 040AR O Ring Kit 4-Oil X Evolution 50 4
Domnick Hunter 040AR O Ring Kit 4-Oil X Evolution 50 4
AMAT 0200-04235 ISOLATOR 0200-04235 CERAMIC
VERITY INSTRUMENTS EP1001 SYSTEM CONTROLLER 100-240V
VERITY INSTRUMENTS EP1001 SYSTEM CONTROLLER 100-260V
Mactronix-Eurek?a IIISR – UKA 650 Wafer Transfer Units
Mactronix-Eurek?a UKA 650A3 Wafer Transfer Unit
Mactronix Wafer Transfer Unit – Wafer Handler
Bruce 7660 BoatLoad Control modules BTI Furnace
APPLIED MATERIALS 0020-30797 PERFORATED PLATE SHOWER HE