控制按鈕通常不用于非常重要的操作。因此，它們不受控制密碼的保護(hù)。然而，通過監(jiān)控它們的輸出操作數(shù)，為安全可靠起見用戶可以動(dòng)態(tài)地激活控制按鈕或使之失效。每個(gè)控制按鈕給出它自己的靈活邏輯操作數(shù),控制按鈕1(7)接通。

PALL FILTER CARTRIDGE PN#T90081000300 ITEM#FLHF200M3F 3

TEL TOKYO ELECTRON 1181-000524-12 PCB ASSY MC-31137 A8S

TEL TOKYO ELECTRON 1181-000393-18 PCB ASSY REV 1C 101F

APPLIED MATERIALS 0200-01570 RING SILICON EXTENDED COVE

WHITE KNIGHT SPARES RBAP100-1

SMC 60-254066-00 GATE VALVE,(R),KIT,S?LT REPAIR XGT200-3

PORTER MFC D2000I-M042 IPA 1.0 .14 ML/MIN LIQIUD FLOW M

Semitool Verteq Rotor A182-50M/MB/MC,?H-Bar 600R0516-501

Advantest Extender Board BGS-026818

MYKROLIS MM06083004 FC2902MEP5-T MFC N2 5 SLPM MASS FLO

TEL TOKYO ELECTRON 1181-000308-17 PCB ASSY WAFER COUNTE

LAM 853-032908-001 R VALVE TURBO BYPASS REPAIRED REV B

Aera FC-D980C MFC SF6 100sccm MASS FLOW CONTROLLER

AERA AMAT FC-981C 3030-06966 HE 10 SLM TC FC-981SBC

AERA AMAT FC-981C 3030-06966 HE 10 SLM TC FC-981SBC

AERA FC-D980C MFC S5R4V-15JW 20sccm N2 MFC REP MASS

UNIT MFC UFC-1661C N2 10SCCM MULTIFLO

UNIT MFC UFC-1661C N2 1SLM MULTIFLO MASS FLOW CONTROLLE

UNIT MFC UFC-1661C N2 2000 SCM MULTIFLO MASS FLOW CONTR