這個部分允許繼電器中用戶定制的對靈活邏輯操作數(shù)狀態(tài)的存取。狀態(tài)位是這樣打包的，以便于16個狀態(tài)可以在一個Modbus寄存器中讀出來。狀態(tài)位可以這們配置，以便于所有的用戶感興趣的狀態(tài)量在最少的Modbus寄存器中是可用的。

Eaton PN 17A8076 6″ Partition Plate

UNIT MASS FLOW CONTROLLER 300SCCM GAS-SiH4 PN#1200A-102

Tegal Plasma Etch OPTICAL FILTER – 901E CELL- A

Tegal Plasma Etch OPTICAL FILTER – 903E CELL- A

GAT, INC GMC1000-6

APPLIED MATERIALS 0200-20499 COVER,WIDE BODY QTZ WINDOW

Semitool 245004-503 Fiber Optic Board Receiver

Mallory CGS373UO75X5L 658-9533-757 – 37,000 uf 75 VDC

MILLIPORE WPRV200SI FILTER INERT GASES PURIFIER WAFERP

Littelfuse FLSR 250ID 600 Volt

VARIAN 17118520 BLOCK,POLE LONG ES QUAD VG

Turck Bi1-EG05-AN6X Switch Set/Censor, M5 x 0.5,

Integrated Power Designs PN SRW-300-1004 VIN: 100-120/2

OMRON Time Counter PN H7ET-NFV1-B

TAMZO E0R05-17895A PULSE GENARATE CONTROL BOARD

VEECO PROCESS METR 192618 SENSOR, STAGE LIFT POSITION

THK LM Sys. PN RSR15WUU1+310L1 Linear Guide SN A7B6-771

Plast-O-Matic Valves Inc. GGMT060-PV PVC Molded Guage

APPLIED MATERIALS 0021-07079 COVER CATHODE LINER COOLIN

APPLIED INDUSTRIAL GASKET RING 503308-LOT OF 10