用戶可編程按鈕要求有-個HP型的繼電器面板。如果單獨定購HP型的面板，繼電器的定貨碼必須改變以表明HP面板。這可以通過EnerVista UR安裝的鳙護>啟用按鈕命令。這個部分提供了一個機構(gòu),在其中任何256個選中的靈活邏輯操作數(shù)狀態(tài)可以用于有效的監(jiān)控。

HK-15A-5 P C BOARD PUV-810C39-0073?W227

Eaton PN 17121930 Rev A Tzm Rep. Cathode Side

Sunx CX-22-PN-J Photo Electric Sensor

GENUS INC 42279-03 PCB VAC CONTROLLER FRONT PANEL REV B

SCB4275B PCB REV C

AXCELIS 17111860 TUBE FLANGE (S ,GRAPHITE TUBE V

APPLIED CERAMICS 911-02075A AEP RING COMPOSITE RETAINI

BRUCE BTI 7351C BTI 7351C CONTROLLERS 9760400

MKS 225AD-00010AAB 10 TORR

Semitool 72015-23 Asahi/America Pneumatic Valve Model A

AMAT 0020-21677 BUSHING INNER MGN C REV D 2-10968000-0

Tegal PN 80-200-314 Plasma Etch 9xx, CAM FOLLOWER 1/2OD

Eaton Graphite GSD Shield PN 17128250

COSEL PBA600F-24 POWER SUPPLY

SMC Corp. MQQTB10-15D Compact Cylinder, Metal Seal, Low

SMC Corp. PN MGPM12-50 Compact Guide Cylinder

SQUARE D KAL26225-1127 Series 2 225A THERMAL-MAGNETI?C C

VARIAN BB10158038 PLATE RETAINER PIN PLATE

Eaton PN 17A8076 6″ Partition Plate

UNIT MASS FLOW CONTROLLER 300SCCM GAS-SiH4 PN#1200A-102