描述
TRICONEX 4211
傳感、通信、計算機技術(shù)構(gòu)成現(xiàn)代信息的三大基礎(chǔ)，80年代是個人計算機，90年代是計算機網(wǎng)絡，預計21世紀第一個10年熱點很可能是傳感、執(zhí)行與檢測。傳感器的作用主要是獲取信息、是信息技術(shù)的源頭。在信息時代里，隨著各種系統(tǒng)的自動化程度和復雜性的增加。需要獲取的信息量越來越多，不僅對傳感器的精度、可靠性和響應要求越來越高，還要求傳感器有標準輸出形式以便和系統(tǒng)聯(lián)接。顯然傳統(tǒng)的傳感器因其功能差，體積大很難滿足要求。發(fā)展高性能的、以硅材料為主的各種先進傳感器已成為必然。如諧振式、電容式、光電式和場效應化學傳感器等。盡管它們的敏感機理不同，但其總的共同特點是向微型化、智能化方向發(fā)展。近年來，微電子、微機械、新材料、新工藝的發(fā)展與計算機、通信技術(shù)的結(jié)合創(chuàng)造出新一代的傳感器與檢測系統(tǒng)。
傳感器的發(fā)展方向：微傳感器
微傳感器的特征之一是體積小，其敏感元件的尺寸一般為微米級。是由微機械加工技術(shù)制作而成的，包括光刻、腐蝕、淀積、鍵合和封裝等工藝。利用其中的各向異性腐蝕、犧牲層技術(shù)LIGA工藝，可以制造出層與層間有很大差別的三維微結(jié)構(gòu)。包括可活動的膜片、懸臂梁、橋以及凹槽、孔隙、錐體等。這些微結(jié)構(gòu)與特殊用途的薄膜和高性能的集成電路相結(jié)合，已成功地用于制造各種微傳感器乃至多功能的敏感元件陣列(如光電探測器等)，實現(xiàn)了諸如壓力、力、加速度、角速率、應力、應變、溫度、流量、成像、磁場、濕度、PH值、氣體成分、離子和分子濃度以及生物傳感器等。
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